| 摘要 |
PROBLEM TO BE SOLVED: To provide a light valve which can give high contrast, using a piezoelectric device whose operation quantity saturates and making the tilt quantity of a mirror larger than conventional. SOLUTION: The figure shows an elastic body 101, a thin-film piezoelectric element 102, electrodes 105 and 106, columns 14, 104, and 107, a mirror 108, and metallic support layers, etc., 16, 22, and 103. A thin-film piezoelectric device 18 has the same characteristics as the thin-film piezoelectric element 102. When the identical voltage is applied to them, tilting of the mirror 108 can be made twice as large as that, when one thin-film piezoelectric element is present.
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