ALIGNER FOR WAFER FLAT ZONE

摘要

PURPOSE: An aligner for a wafer flat zone is provided to make a wafer strongly attached to a slot of a wafer cassette, by installing isolation walls for limiting the movement of the wafer in a drive roller which rotates the wafer and aligns the flat zone. CONSTITUTION: A rotation axis comes in contact with the circumferential surface of the wafer(6) and rotates the circumferential surface. The isolation walls limit a movement distance of the wafer while the wafer rotates, protruding from the rotation axis corresponding to both sides of the wafer and in parallel with the alignment direction of the wafer in contact with the rotation axis. A drive unit rotates the rotation axis. A wafer rotating unit(20) includes the rotation axis, the isolation walls and the drive unit. The flat zone of the wafer rotated by the wafer rotation unit is settled in a wafer guide unit(30). The wafer guide unit stops the rotation of the wafer and performs an alignment regarding the flat zone. A wafer detecting unit(41) detects whether the wafer exists, inserted between the wafers.