发明名称 MEASURING METHOD FOR MOIRE FRINGES, MANUFACTURING METHOD FOR FILM AND RECORDING MEDIUM FOR STORING PROGRAM FOR MEASUREMENT OF MOIRE FRINGES
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method for a film wherein the degree of moire fringes is quantified (digitized) even when the moire fringes are generated due to the overlap of fine patterns, geometrical patterns are magnified at a definite magnification, an enlarged graphic is generated so as to be measured objectively and the generation of the moire fringes is reduced to a minimum and to provide a recording medium which stores a program after a measuring method for the moire fringes is changed into the program. SOLUTION: A first graphic formed on a first plane is magnified at a definite magnification, and a first magnified graphic is generated. A second graphic formed on a second plane is magnified at the same magnification, and a second magnified graphic is generated. The first and second magnified graphics are overlapped so as to generate the moire fringes. One from among the first and second magnified graphics is turned at a definite angle with reference to the other, and the pitch and the degree of visibility of the moire fringes are measured at every angle. On the basis of a measured result, an angle at which the pitch or the degree of visibility of the moire fringes becomes minimum is specified.
申请公布号 JP2002090261(A) 申请公布日期 2002.03.27
申请号 JP20000278009 申请日期 2000.09.13
申请人 HITACHI CHEM CO LTD 发明人 UEHARA TOSHISHIGE;TOSAKA MINORU
分类号 G01B11/24;G01M11/00;(IPC1-7):G01M11/00 主分类号 G01B11/24
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