| 摘要 |
PROBLEM TO BE SOLVED: To provide an economical semiconductor testing device which can obtain a higher degree of freedom than in conventional techniques and which can easily deal with a device under test (DUT) using an asynchronous signal. SOLUTION: The semiconductor testing device is constituted in such a way that a plurality of per-pin-type electronics parts which output a required test pattern to the DUT and which are equipped with a decision function to compare a response output from the DUT by the test pattern with a reference voltage so as to be decided are formed as an independent pin electronics group on which a reference signal generator to generate individual reference signals and a pattern generator to individually generate the test pattern are mounted individually and in which the respective pin electronics parts can execute pattern generation sequences different at independently different timings.
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