Method of simultaneously etching waveguides and intersecting trenches for a switching matrix application

摘要

A method of fabricating an optical waveguide device that includes a waveguide and a trench, comprises providing a substrate material that includes a substrate layer, an underclad layer, a core layer, and an overclad layer. A waveguide and trench pattern is simultaneously defined in the substrate material and the substrate material is etched to form a waveguide circuit structure that includes the waveguide and trench pattern. Thus, the waveguide and the trench are self-aligned. The trenches can house moveable mirrors and/or index-matching fluid in order to work as a switch.