SYSTEM FOR GENERATING SURFACE CLEANING AEROSOL

摘要

PURPOSE: A system for generating surface cleaning aerosol is provided to prevent a venturi nozzle from being stopped up and to eliminate fine contaminant of a sub micron size, by using an atomized high-purity solid-type material. CONSTITUTION: A cleaning medium supplying source(10) supplies a gas-type cleaning medium. A carrier supplying source(20) supplies a carrier capable of being mixed with the gas-type cleaning medium and transferring the gas-type cleaning medium. Cryogenic liquefied nitrogen is stored in a low-temperature storage receptacle(32). A cooling pipe(38) induces the carrier exhausted from the carrier supplying source so that the carrier passes through the low-temperature storage receptacle. A heater(37) irradiates heat to the cooling pipe to make the carrier of the cooling pipe not over-cooled. A heat exchanger(30) includes the low-temperature storage receptacle, the cooling pipe and the heater. A mixer(40) uniformly mixes the carrier exhausted from the heat exchanger with the gas-type cleaning medium exhausted form the cleaning medium supplying source. The venturi nozzle(60) adiabatically expands the cleaning medium exhausted from the mixer at a low pressure, and generate aerosol of high speed and high pressure. A moisture coagulation preventing unit prevents moisture from being coagulated on the outer surface of the venturi nozzle.