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经营范围
发明名称
HIGH RPM MEGASONIC CLEANING
摘要
申请公布号
EP1189710(A1)
申请公布日期
2002.03.27
申请号
EP20000939874
申请日期
2000.06.13
申请人
LAM RESEARCH CORPORATION
发明人
FARBER, JEFF;RADMAN, ALLAN, M.;SVIRCHEVSKI, JULIA;TREICHEL, HELMUTH
分类号
H01L21/304;B08B1/04;B08B3/12;(IPC1-7):B08B3/12
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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