| 摘要 |
PROBLEM TO BE SOLVED: To efficiently sort inspected objects having new defects hard to solve by conventional knowledge, out of a large number of objects to be inspected. SOLUTION: This analysis system for defects detected in a plurality of objects to be inspected has an appearance inspection device 100 for detecting defective parts in the inspected objects; a defect classifying device 200 for detecting detailed information in the defective parts and classifying the defects into known defects whose appearance is confirmed, and new defects whose appearance is not confirmed; and a defect analysis device 300 for accepting the assignment of the inspected objects and analyzing the assigned inspected objects. The appearance inspection device 100, the defect classifying device 200 and the defect analysis device 300 can have display devices for displaying the number of defects every classification including the new defects. |
