摘要 |
<p>PROBLEM TO BE SOLVED: To provide an X-ray irradiation device increasing the intensity of primary X-rays and monochromatic X-rays for irradiating a sample. SOLUTION: This X-ray irradiation device is provided with an X-ray tube 40 generating a continuous X-ray and a characteristic X-ray and emitting both X-rays from two or more apertures 41, 42, 43; a converging optical system 10 for converging primary X-rays 11 emitted from one aperture 41 out of the apertures 41, 42, 43, toward the sample 100 to irradiate the sample 100 with primary X-rays 112; a converging spectroscopic optical system 30 for converging and making primary X-rays 81 emitted from the other aperture 43 out of the apertures 41, 42, 43, monochromatic to irradiate the sample 100 with monochromatic X-rays 34; and a light shielding member 14A provided to freely advance and retreat from the optical path of the converging optical system 10.</p> |