| 摘要 |
PROBLEM TO BE SOLVED: To separate and remove a gas impurity containing a carbon in a sulfur hexafluoride (SF6) gas. SOLUTION: An apparatus for refining the sulfur hexafluoride gas comprises a refrigerator 4 for generating a condensing temperature and a solidifying temperature of the sulfur hexafluoride gas, a fractionator 5 for condensing the sulfur hexafluoride gas at the condensing temperature to a liquefied sulfur hexafluoride gas and separating gas impurity contained in the sulfur hexafluoride gas, a cold trap 11 for solidifying the sulfur hexafluoride gas retained in the gas impurity separated by the fractionator 5 at the condensing temperature to separate a solid sulfur hexafluoride, and a vaporizer 13 for vaporizing the liquefied sulfur hexafluoride condensed by the fractionator 5 and the liquefied sulfur hexafluoride liquefied by thawing the solid sulfur hexafluoride.
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