METHOD FOR SUPPRESSING GENERATION OF PROJECTION IN METAL VAPOR DEPOSITED FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for effectively suppressing the generation of projections on a metal vapor-deposited film of aluminum or zinc when the film is formed on a surface of a work such as rare earth permanent magnet. SOLUTION: When a metal vapor deposition material is vapor-deposited on a surface of a work while rotating an accommodating member and/or a holding member around the axis of rotation in the horizontal direction by using a vapor deposition apparatus having a vaporization unit of the vapor deposition material and the accommodating member and/or the holding member for accommodating and/or holding the work, Vickers hardness of the film formed on the surface of the work is maintained to be >=25.