Scintillator panel, radiation image sensor and methods of producing them

摘要

Scintillator panel 1 comprises a radiation transmitting substrate 5, which has heat resistance, a dielectric multilayer film mirror 6, as a light reflecting film and is formed on the radiation transmitting substrate 5, and a scintillator 10, disposed on the dielectric multilayer film mirror 6 and emits light by conversion of the radiation 30 that has been made to enter the radiation transmitting substrate 5 and has passed through the dielectric multilayer film mirror 6. Since the radiation transmitting substrate 5 has heat resistance, the dielectric multilayer film mirror 6 can be vapor deposited at a high temperature and, as a result, can be formed in a state of high reflectance. Also, unlike a metal film, the dielectric multilayer film mirror 6 will not corrode upon reacting with the scintillator 10.