Measurement position determination on a semiconductor wafer

摘要

A measurement recipe includes measurement positions, which are expressed by coordinates in a wafer coordinate system defined on the wafer, and therefore the measurement recipe is applicable to a plurality of measurement devices. The coordinates of the respective measurement points in the wafer coordinate system are transformed into the coordinates in a stage coordinate system defined on a stage of a measuring device. This enables the respective measurement points on the wafer to be positioned by the coordinates in the stage coordinate system of the measuring device.