| 摘要 |
A process for preparing a semiconductor which is capable of implanting indium effectively during the process of forming a gate insulation film with different levels of thickness includes a 1st step of forming a 1st resist mask on a predetermined region lying on a P-type silicon substrate having an element isolation region formed thereon to form a P-well region before forming a 1st N-channel region made of components other than indium on the P-well region, a 2nd step of removing the 1st resist mask before forming a 1st gate insulation film on the surface of the substrate, a 3rd step of forming a 2nd resist mask on the predetermined region except the 1st N-channel region after forming the 1st gate insulation film, and removing partially the 1st gate insulation film, a 4th step of forming a P-well region inside the 1st gate insulation film partially removed region before forming a 2nd N-channel region containing indium on this P-well region, and a 5th step of removing the 2nd resist mask before forming a 2nd gate insulation film on the surface of the 2nd N-channel region.
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