| 摘要 |
A metal-containing toner is electrostatically printed on a semiconductor surface. Subsequently, this surface is annealed to achieve certain material modifications selectively at the regions where the toner is applied. If the toner contains a crystallization-catalyst metal, such as, Pd, Ni, Pt, and Cr, and is printed on an amorphous semiconductor film, annealing results in conversion of the printed regions to polycrystalline. If the metal-containing toner is printed on a silicon surface (i.e., amorphous/poly-Si layer or Si wafer) the printed regions are selectively converted to a metal-silicide (with the sufficient amount of metal applied on these regions) upon annealing.
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