| 发明名称 |
Method and device for nondestructive detection of crystal defects |
| 摘要 |
The nondestructive detection and characterization of crystal defects in monocrystalline semiconductor material is by a combination of photoluminescence heterodyne spectroscopy, photothermal heterodyne spectroscopy and SIRD.
|
| 申请公布号 |
US6362487(B1) |
申请公布日期 |
2002.03.26 |
| 申请号 |
US19990318655 |
申请日期 |
1999.05.25 |
| 申请人 |
WACKER SILTRONIC GESELLSCHAFT FUER HALBLEITERMATERIALIEN AG |
发明人 |
EHLERT ANDREAS;KERSTAN MICHAEL;LUNDT HOLGER;HELMREICH DIETER |
| 分类号 |
C30B33/00;G01N21/17;H01L21/66;(IPC1-7):G01N21/64 |
主分类号 |
C30B33/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
