发明名称 ULTRASONIC VIBRATION UNIT, ULTRASONIC CLEANER, AND ULTRASONIC CLEANING METHOD
摘要 PROBLEM TO BE SOLVED: To provide an ultrasonic vibration unit which uses a high temperature liquid as a cleaning liquid and gives a high cleaning efficiency even in the case that the cleaning liquid flows slowly, and to provide an ultrasonic cleaner using the ultrasonic vibration unit. SOLUTION: The flow channels of cooling water are formed between vibration plates 18, 18a, 18b, 18c, 18d, and vibration transmission plates 19, 19a, 19b, 19c, 19d, thereby constituting the ultrasonic vibration unit so that the bonded parts of ultrasonic vibrators 17a to 17d and vibration plates 18 to 18d can be cooled.
申请公布号 JP2002086068(A) 申请公布日期 2002.03.26
申请号 JP20000281830 申请日期 2000.09.18
申请人 TOSHIBA CORP 发明人 MATSUSHIMA DAISUKE;HAYAMIZU NAOYA;WATANABE HIDEHIRO;MASUI KENJI;KOSAKA AKIO
分类号 B08B3/12;B06B1/02;B06B1/06;H01L21/304;(IPC1-7):B06B1/02 主分类号 B08B3/12
代理机构 代理人
主权项
地址