发明名称 Method for preparing high temperature superconductor
摘要 A method of depositing a biaxially textured metal oxide on a substrate defining a plane in which metal oxide atoms are vaporized from a source to form a plume of metal oxide atoms. Atoms in the plume disposed at a selected angle in a predetermined range of angles to the plane of the substrate are allowed to contact the substrate while preventing atoms outside a selected angle from reaching the substrate. The preferred range of angles is 40°-70° and the preferred angle is 60°±5°. A moving substrate is disclosed.
申请公布号 US6361598(B1) 申请公布日期 2002.03.26
申请号 US20000621272 申请日期 2000.07.20
申请人 THE UNIVERSITY OF CHICAGO 发明人 BALACHANDRAN UTHAMALINGAM;CHUDZIK MICHAEL P.
分类号 C30B23/02;H01L39/24;(IPC1-7):C30B25/02 主分类号 C30B23/02
代理机构 代理人
主权项
地址