发明名称 INITIAL DRESSING METHOD FOR ABRASIVE CLOTH
摘要 PROBLEM TO BE SOLVED: To shorten the time of the initial dressing process, prolong the lifetime of an abrasive cloth and enhance the quality of the product by judging accurately the time when the initial dressing is completed. SOLUTION: A new abrasive cloth 2 is affixed onto a turntable 3, and initial dressing of the abrasive cloth is started. The drive torque of a dresser 11 is sensed, and the obtained values are integrated about the time at certain intervals for a specified sampling period. After the specified sampling frequency N has passed, comparison is started for the latest integral value with the integral value obtained at the sampling period one before. If the result from comparison shows that the difference between the two integrals is below the specified limit value, judgement is passed that the torque is stabilized. If thereafter the integral value starts lowering and its difference from the integral obtained at the sampling period one before has become over the limit value, judgement is passed that the time of completion of the initial dressing is attained, and the operation proceeds to the next process.
申请公布号 JP2002086342(A) 申请公布日期 2002.03.26
申请号 JP20000278851 申请日期 2000.09.13
申请人 TOSHIBA MACH CO LTD 发明人 KAWAMO TAKAHIRO;TOKUYAMA HARUMICHI
分类号 B24B53/00;B24B53/017;H01L21/304 主分类号 B24B53/00
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