| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a micro-device having a capillary cavity, particularly to the manufacturing method for a micro-device having complicated passages formed in three-dimensions, and to provide a micro- device in which plural resin layers are stacked and the capillary cavities are communicated with each other through the respective layers having multi- function such as a passage, a reaction vessel, a diaphragm type valve and a valve structure. SOLUTION: According to this manufacturing method for the micro-device having a cavity inside, a coat having a defective part is formed of energy line curable composition on a support, the coat is stacked on another member to remove the support, and the coat is cured by again applying active energy line to be bonded to the member. The micro-device has a lamination structure where one or more cured resin coats having the defective part are stacked on the member having the defective part penetrating the member or recessed in the surface, and at least two or more defective parts in the member are connected to form a cavity. |
