LIQUID PROCESSING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide liquid processing equipment capable of stably moving a discharge nozzle to a uniaxial direction and uniformly feeding a processing liquid to a substrate. SOLUTION: The liquid processing equipment, e.g. a development processing unit (DEV) 24a-24c being one form thereof is provided with a retaining means such as a spin chuck 41 on which a base plate G is placed and retained; a paddle formation nozzle 80 for discharging a predetermined developer onto a surface of the base plate G retained by the spin chuck; a nozzle retaining arm 51 for retaining the paddle formation nozzle 80; and guide rails 53a, 53b arranged in parallel so as to engage with the nozzle retaining arm 51 near a longitudinal end of the nozzle retaining arm 51. The nozzle retaining arm 51 is moved to the longitudinal direction along the surface of the base plate G retained by the spin chuck 41.