发明名称 COATING METHOD AND COATING TOOL, AND MANUFACTURING METHOD AND EQUIPMENT FOR DISPLAY MEMBER AND PLASMA DISPLAY
摘要 PROBLEM TO BE SOLVED: To provide a means to reduce thick area at the starting part and the finishing part of a coating film using a die coater with a constant delivery pump so that the quality and productivity of the film are improved by saving an amount of the coating solution, expansion of the effective area and shortning of the coated length. SOLUTION: In the method for forming a film on a member to be coated by supplying a coating solution to a coating tool from a fixed displacement pump and transferring at least one of the coating tool and the member to be coated relatively while discharging the coating solution from the discharge port to the member to be coated, the coating method, and the coating tool as well as the method for manufacturing the member for plasma displays and the plasma display, and the manufacturing equipment therefor are characterized in that the feed rate of the coating solution from the fixed displacement pump to the coating tool is gradually increased are reduced in proportion to the relative transfer rate to form the film thickness profile in the predetermined shape.
申请公布号 JP2002086044(A) 申请公布日期 2002.03.26
申请号 JP20000283433 申请日期 2000.09.19
申请人 TORAY IND INC 发明人 KITAMURA YOSHIYUKI;SAKUMA ISAMU;TANI YOSHINORI
分类号 G03F7/16;B05C5/02;B05C11/10;B05D1/26;B05D7/00;H01J9/02;H01J11/22;H01J11/34;H01J11/36;H01L21/027 主分类号 G03F7/16
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