| 摘要 |
<p>PROBLEM TO BE SOLVED: To lessen guide mechanisms in a treating vessel and to provide a treating device equipped with the treating vessel hardly susceptible to heat strain by heating of an object to be treated. SOLUTION: Two driving support axes 2a, 2b whose both the ends pass through the wall of a treating vessel 1 and lead to the outside are provided, and on both the sides of the vessel, linear motors 4a, 4b for translating and transferring the axes in the vessel are provided. In the vessel, a holding base 6 for a substrate is supported by the driving support axes through a support frame 13. In places at which the driving support axes pass through the wall of the vessel, vacuum bellows 5a, 5b are installed so that airtightness in the vessel is maintained. The traveling of the holding base is guided in the vessel by one guide mechanism 17 extending in the same direction as the driving support axes through the support frame.</p> |
