| 摘要 |
PROBLEM TO BE SOLVED: To realize an electrostatic capacitance type acceleration sensor, an electrostatic capacitance type angular acceleration sensor and an electrostatic actuator which make electrodes highly resistant to possible damages, even if acceleration is applied excessively. SOLUTION: The conventional fixed electrode is replaced with a mobile electrode and hence, mobile electrodes are arranged for both the electrodes. The rigidity of beam parts 3 and 6 of both the electrodes is previously adjusted, so that the moving values of the first and second mobile electrodes 4 and 7 differ separately, when acceleration is applied. Acceleration is detected from changes in electrostatic capacitance between the first and second mobile electrodes 7. This realizes the electrostatic capacitance type acceleration sensor, which makes the electrodes highly resistant against possible damages, when the acceleration is applied excessively. |
