| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump with a high safety capable of speedily making a device to a re-usable state by exchanging the vacuum pump without damaging a chamber and a product during processing by broken pieces even in the case where a rotor is destroyed by any chance. SOLUTION: In the vacuum pump in which a gas discharge part is constituted by a rotor R and a stator S at the inside of a pump casing 14, the rotor constituting the gas discharge parts L1, L2 is axially and/or radially divided to at least two rotors 115, 116.
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