| 摘要 |
PROBLEM TO BE SOLVED: To make a space where cleaning is necessary as small as possible. SOLUTION: A substrate delivering member 60 is arranged in a housing box 50 retained with a rotation shaft 43 which is rotatable horizontally to a moving body in a carrying direction. Consequently, a glass substrate G is scarcely brought into contact with particles floating outside the housing box 50, so that it is unnecessary that a carrying area of a substrate is made clean environment, and the forming cost of clean environment can be remarkably reduced. |
