| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem where, at manufacturing a multilayer ceramics substrate based on so-called a non-contraction process, the flow of glass component contained in a base body green layer is obstructed so that a sufficient denseness is not attained in a ceramics layer acquired from the base body green layer as the base body green layer is constrained by a constraint green layer in a baking process. SOLUTION: A temperature rising speed between a binder removal process where a binder contained in the base body green layer 14 is removed and a baking process to bake a low-temperature baked ceramics material contained in the base body green layer 14 is set to 20 deg.C per minute or higher. Thus, the glass component contained in the base body green layer 14 is fluidized faster and the ceramics powder contained in the base body green layer 14 is started to be condensed earlier, so that the ceramics powder is sufficiently condensed before a final stage of baking. |
