| 摘要 |
PROBLEM TO BE SOLVED: To support a support beam for connecting mass parts at an appropriate position to prevent a vibration of the mass part from conducting to a board and raise the detection accuracy to improve the reliability. SOLUTION: A central mass part 3 and a pair of outside mass parts 4, 4 are connected through a support beam 5 replaceably in an X-axis direction. During actuating of an angular velocity sensor 1, a vibration generating means 10 vibrates the mass parts 3, 4 approximately in the opposite phase mutually to the X axis direction. When an angular velocity Ω around a Y axis is added in this condition, the displacements of the mass parts 3, 4 shifting in a Z-axis direction are detected as the angular velocity Ω. Fixtures 6 on a board 2 support nodes 5A of the beam 5 corresponding to nodes of the mass parts 3, 4 vibrating mutually in the opposite phase, thereby suppressing the vibrations of the mass parts 3, 4 from conducting to the board 2. |
