| 发明名称 |
Substrate transporting device |
| 摘要 |
This invention provides a substrate transportation apparatus in which a loader and macroinspection/transportation section are separate to be independent of each other. The loader can be arranged on the left side or rear side of the macroinspection/transportation section when seen from the front side. The substrate transportation apparatus can easily be changed in accordance with various types of specifications of apparatus layout. |
| 申请公布号 |
AU8445601(A) |
申请公布日期 |
2002.03.22 |
| 申请号 |
AU20010084456 |
申请日期 |
2001.09.06 |
| 申请人 |
OLYMPUS OPTICAL CO., LTD. |
发明人 |
NORIO MARUYAMA;DAISUKE YOKOI;YASUO MORI;YOSHIHISA TANIGUCHI |
| 分类号 |
H01L21/00;H01L21/677;H01L21/68;H01L21/687 |
主分类号 |
H01L21/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
