| 摘要 |
PROBLEM TO BE SOLVED: To provide a device having a piezoelectric element in which deterioration of characteristic of the piezoelectric element is retrained, and its manufacturing method. SOLUTION: The device with a piezoelectric element contains a piezoelectric element 100 arranged on a semiconductor substrate 10. A barrier layer 130 covering at least a part of the piezoelectric element 100 is formed. The barrier layer 130 whose main component is AlOX contains further at least one kind selected from TiOx, ZrOx, HfOx, SiOx and VOx. |
