发明名称 METHOD FOR PATTERNING NON-PHOTOIMAGE FORMABLE CERAMIC TAPE
摘要 PROBLEM TO BE SOLVED: To provide a novel method for patterning and forming a ceramic green tape which does not contain photoimage formable components. SOLUTION: This method for patterning the non-photoimage formable ceramic tape includes (a) a process of adhering a photosensitive layer and at least one photoresist including at lest one polymer binder containing an alkaline functional side group to the non-photoimage formable ceramic tape containing at least one polymer binder containing an acid functional side group; (b) a process of exposing the photoresist and curing the exposed portions of the photoresist; (c) a process of exposing the portions of the ceramic tape by removing the uncured portions of the photoresist by using a first developer containing an acidic developer; and (d) a process of removing the exposed portions of the ceramic type by using a second developer containing an alkaline developer.
申请公布号 JP2002082453(A) 申请公布日期 2002.03.22
申请号 JP20010212137 申请日期 2001.07.12
申请人 E I DU PONT DE NEMOURS & CO 发明人 CHOI JOHN HAETAK
分类号 G03F7/11;C04B41/45;C04B41/81;G03F7/033;G03F7/40;H05K1/03;H05K3/00 主分类号 G03F7/11
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