发明名称 |
METHOD FOR PATTERNING NON-PHOTOIMAGE FORMABLE CERAMIC TAPE |
摘要 |
PROBLEM TO BE SOLVED: To provide a novel method for patterning and forming a ceramic green tape which does not contain photoimage formable components. SOLUTION: This method for patterning the non-photoimage formable ceramic tape includes (a) a process of adhering a photosensitive layer and at least one photoresist including at lest one polymer binder containing an alkaline functional side group to the non-photoimage formable ceramic tape containing at least one polymer binder containing an acid functional side group; (b) a process of exposing the photoresist and curing the exposed portions of the photoresist; (c) a process of exposing the portions of the ceramic tape by removing the uncured portions of the photoresist by using a first developer containing an acidic developer; and (d) a process of removing the exposed portions of the ceramic type by using a second developer containing an alkaline developer. |
申请公布号 |
JP2002082453(A) |
申请公布日期 |
2002.03.22 |
申请号 |
JP20010212137 |
申请日期 |
2001.07.12 |
申请人 |
E I DU PONT DE NEMOURS & CO |
发明人 |
CHOI JOHN HAETAK |
分类号 |
G03F7/11;C04B41/45;C04B41/81;G03F7/033;G03F7/40;H05K1/03;H05K3/00 |
主分类号 |
G03F7/11 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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