METHOD FOR MANUFACTURING THIN FILM MAGNETIC HEAD

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a thin film magnetic head by which defects of exfoliation, loss or the like of a metal film are eliminated, and microfabrication is attained without an increase of its dimension and satisfactory characteristics, quality and a yield are achieved in the formation of the metal film onto a pattern opening part of insulation films on a substrate. SOLUTION: The pattern opening part 20 is dry etched by using the plasma of reducing gas or gas containing inert gas before a metal film 7 is formed onto the pattern opening part 20 of insulation films 6, 5 and 4.