ANTIREFLECTION FILM, OPTICAL SYSTEM HAVING THE ANTIREFLECTION FILM AND EXPOSURE DEVICE USING THE OPTICAL SYSTEM AND METHOD FOR MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an antireflection film having low absorption and excellent antireflection characteristics. SOLUTION: The antireflection film has a six-layer structure which is formed in such a manner that the first and third layers from the air side are low refractive index layers, the second, fourth and sixth layers are high refractive index layers and the fifth layer contains Al2O3.