| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical rotary angle detector having an encoder scale including high resolution and accuracy. SOLUTION: A lattice pattern formed on the encoder scale and a shaft hole are etched by using the same photomasks or photomasks accurately locatable with each other in combination with a photolithography used to manufacture a semiconductor integrated circuit and the like and an etching method using an ion or a plasma.
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