发明名称 Fluid control apparatus and gas treatment system comprising same
摘要 A fluid control apparatus comprises lines A1, A2, A3, A4, A5, B1, B2, B3 each removably attached to a substrate 1 by a plurality of brackets 8, 9, 18, 19, 20, and channel communication means 47, 48 which are removable upward.
申请公布号 US2002033195(A1) 申请公布日期 2002.03.21
申请号 US20010948125 申请日期 2001.09.07
申请人 FUJIMOTO HIDEKI;UZAWA NOBORU;SATO NAOYUKI;YAMAJI MICHIO;TANAKA SHIGEAKI;KAWANO YUJI;OMATA YASUYUKI;FUKUI MASAKAZU 发明人 FUJIMOTO HIDEKI;UZAWA NOBORU;SATO NAOYUKI;YAMAJI MICHIO;TANAKA SHIGEAKI;KAWANO YUJI;OMATA YASUYUKI;FUKUI MASAKAZU
分类号 F17D1/02;F16K27/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):F16K1/00 主分类号 F17D1/02
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