POLISHING PAD COMPRISING PARTICULATE POLYMER AND CROSSLINKED POLYMER BINDER

摘要

A polishing pad (6) is described as comprising, (a) particulate polymer selected from particulate thermoplastic polymer (20) (e.g., particulate thermoplastic polyurethane), particulate crosslinked polymer (e.g., particulate crosslinked polyurethane and/or particulate crosslinked polyepoxide) and mixtures thereof; and (b) crosslinked organic polymer binder (26) (e.g., crosslinked polyurethane binder and/or crosslinked polyepoxide binder), which binds the particulate polymer (20) together. The particulate polymer (20) and crosslinked organic polymer binder (26) are distributed substantially uniformly throughout the polishing pad (6), and the pad (6) has a percent pore volume of from 2 percent by volume to 50 percent by volume, based on the total volume of said polishing pad (6). Polishing pad (6) assemblies are also described.