DIRECT ACTING VERTICAL THERMAL ACTUATOR WITH CONTROLLED BENDING

摘要

A micrometer sized, single-stage, vertical thermal actuator with controlled bending capable of repeatable and rapid movement of a micrometer-sized optic al device off the surface of a substrate. The vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first en d anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above the hot arm relative to the surface. The cold arm is adapted t o provide controlled bending near the first end thereof. A member mechanically and electrically couples the free ends of the hot and cold arms such that th e actuator bends generally at the flexure so that the member moves away from t he substrate when current is applied to at least the hot arm.