An optical device comprises a substrate having a plane surface. An optical path is disposed on the substrate and extends in a plane parallel to the surface of the substrate. A recess intercepts the optical path. An optical element is provided for modifying light incident thereon. The optical element is moveable within the recess between a first position in which the optical element is located in the path and a second position in which optical element is remote from the path. A cantilever suspends the optical elements for movement within the recess between the second and first positions in a direction normal to the surface of the substrate.
申请公布号
WO0223250(A2)
申请公布日期
2002.03.21
申请号
WO2001IB01553
申请日期
2001.08.29
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION;BINNING, GERD, K.;BONA, GIAN-LUCA;HAEBERLE, WALTER;VETTIGER, PETER
发明人
BINNING, GERD, K.;BONA, GIAN-LUCA;HAEBERLE, WALTER;VETTIGER, PETER