Cerium oxide slurry for polishing, process for preparing the slurry, and process for polishing with the slurry

摘要

A cerium oxide slurry for polishing comprising cerium oxide dispersed in water, wherein the slurry has a conductivity of about 30c muS/cm or less when the cerium oxide concentration in the slurry is c wt.%. In order to adjust the conductivity to about 30c muS/cm or less, cerium oxide is washed with deionized water.