OBJECT VISUAL INSPECTION METHOD AND OBJECT VISUAL INSPECTION APPARATUS

摘要

A visual inspection apparatus for inspecting the surface of an object (W) which is not uniformly flat as a whole comprises a CCD television camera (45) for picking up the image of a specified extent including the surface to be inspected, and processors (46, 47) for inspecting the surface based on the brightness information at a plurality of dots equally divided in the image pickup extent. The processors (46, 47) preset a plurality of inspection lines on the image of the surface connecting the points where the difference in brightness, is a little determines the brightness information sequentially at the plurality of dots along the inspection lines, divides the brightness information into a plurality of sets for dot groups including a predetermined number of continuous dots, and inspects the surface along the inspection line based on the brightness information at the dots in each dot group.