| 摘要 |
PURPOSE: A replication method of a molybdenum mould stamper is provided which simplifies two core processes of electroless plating and electrolytic plating in the replication technology of a metal mould stamper required for producing optical devices into chemical vapor deposition process. CONSTITUTION: In a replication method of a metal mold stamper consisting of the steps of forming a plating layer on nonconductor mask patterns so as to mass produce fine components in the nanometer range such as optical devices, and electric or electrolytic plating the mask patterns, the replication method of a molybdenum mould stamper comprises the steps of creating the pressure atmosphere by charging the nonconductor mask patterns into a CVD(chemical vapor deposition) chamber, and checking the base pressure(S50); setting a process pressure by supplying Ar gas as a carrier gas and H2 gas as a reaction gas into the CVD chamber; a chemical vapor deposition step of flowing a source gas of molybdenum gas into the CVD chamber at the process pressure, and coating metal molybdenum on the mask patterns using chemical vapor deposition(S60); and replicating a molybdenum mould stamper by separating a metal molybdenum layer coated on the mask patterns from the mask patterns(S70).
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