发明名称 METHOD AND APPARATUS FOR FAST AUTOMATED FAILURE CLASSIFICATION FOR SEMICONDUCTOR WAFERS
摘要 <p>A method for classifying patterns of failcodes on a semiconductor wafer, in accordance with the present invention, includes determining failcodes for chips on the wafer and checking adjacent chips for each chip on the wafer having a failcode to determine a failcode pattern having a defined number of chips.</p>
申请公布号 WO2002023621(A2) 申请公布日期 2002.03.21
申请号 US2001028470 申请日期 2001.09.13
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