发明名称 |
METHOD AND APPARATUS FOR FAST AUTOMATED FAILURE CLASSIFICATION FOR SEMICONDUCTOR WAFERS |
摘要 |
A method for classifying patterns of failcodes on a semiconductor wafer, in accordance with the present invention, includes determining failcodes for chips on the wafer and checking adjacent chips for each chip on the wafer having a failcode to determine a failcode pattern having a defined number of chips. |
申请公布号 |
WO0223621(A2) |
申请公布日期 |
2002.03.21 |
申请号 |
WO2001US28470 |
申请日期 |
2001.09.13 |
申请人 |
INFINEON TECHNOLOGIES NORTH AMERICA CORP. |
发明人 |
RATHEI, DIETER;OSWALD, PETER;HLADSCHIK, THOMAS;WOHLFAHRT, JOERG |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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