| 摘要 |
<p>A micromachined rate sensor system (348) includes plural sensing proof masses or plates (310, 312) coupled to multiple electrostatic combs (340, 342, 344, 346). A comb drive amplifier (322) induces a deflection of the sense plates along a plane defined by the configuration of the sense plates (310, 312), such that the sensed rotational rate causes an out-of-plane force to act on the sense plates. The motor combs (340, 342, 344, 346) are driven at half NRF by coupling a comb drive amplifier to a half frequency motor oscillator (400) comprising a digital "divide by 2" flip flop (424), a low pass filter (426), a multiplier (418), and a plurality of signal amplifiers (428). The half frequency oscillator (400) provides the drive voltage at one-half the NRF. Accordingly, embodiments of the present invention eliminate undesirable parasitic drive feedthrough at the motor frequency, thus providing for increased efficiency.</p> |
