发明名称 |
Inspection data analyzing system |
摘要 |
The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.
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申请公布号 |
US2002034326(A1) |
申请公布日期 |
2002.03.21 |
申请号 |
US20010984523 |
申请日期 |
2001.10.30 |
申请人 |
ISHIKAWA SEIJI;SAKATA MASAO;NAKAZATO JUN;SHIMOYASHIRO SADAO;NAGATOMO HIROTO;TANIGUCHI YUZO;SATOU OSAMU;OKABE TSUTOMU;SAKAMOTO YUZABURO;MURAMATSU KIMIO;MATSUOKA KAZUHIKO;HASHIMOTO TAIZO;OHYAMA YUICHI;EBARA YUTAKA;MIYAZAKI ISAO;HANASHIMA SHUICHI |
发明人 |
ISHIKAWA SEIJI;SAKATA MASAO;NAKAZATO JUN;SHIMOYASHIRO SADAO;NAGATOMO HIROTO;TANIGUCHI YUZO;SATOU OSAMU;OKABE TSUTOMU;SAKAMOTO YUZABURO;MURAMATSU KIMIO;MATSUOKA KAZUHIKO;HASHIMOTO TAIZO;OHYAMA YUICHI;EBARA YUTAKA;MIYAZAKI ISAO;HANASHIMA SHUICHI |
分类号 |
H01L21/66;G01N21/88;G01N21/956;(IPC1-7):G06K9/00 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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