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发明名称
INTERFEROMETER
摘要
申请公布号
EP0786075(B1)
申请公布日期
2002.03.20
申请号
EP19950930548
申请日期
1995.09.15
申请人
KAUPPINEN, JYRKI
发明人
KAUPPINEN, JYRKI
分类号
G01B9/02;G01J3/45;G01J3/453;G01J9/02;(IPC1-7):G01J3/45
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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