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发明名称
ELECTROSTATIC MICROACTUATOR WITH OFFSET AND/OR INCLINED COMB DRIVE FINGERS
摘要
申请公布号
EP1188225(A1)
申请公布日期
2002.03.20
申请号
EP20000923312
申请日期
2000.04.12
申请人
IOLON, INC.
发明人
GRADE, JOHN, D.;JERMAN, JOHN, H.
分类号
G02B6/35;H02N1/00;(IPC1-7):H02N1/00
主分类号
G02B6/35
代理机构
代理人
主权项
地址
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