发明名称 |
SEGMENTED CONTACTOR |
摘要 |
<p>A method of fabricating a large area, multi-element contactor. A segmented contactor is provided for testing semiconductor devices on a wafer that comprises a plurality of contactor units mounted to a substrate. The contactor units are formed, tested, and assembled to a backing substrate. The contactor units may include leads extending laterally for connection to an external instrument such as a burn-in board. The contactor units include conductive areas such as pads that are placed into contact with conductive terminals on devices under test.</p> |
申请公布号 |
EP1188061(A1) |
申请公布日期 |
2002.03.20 |
申请号 |
EP20000947625 |
申请日期 |
2000.06.06 |
申请人 |
FORMFACTOR, INC. |
发明人 |
ESLAMY, MOHAMMAD;PEDERSEN, DAVID, V.;COBB, HARRY, D. |
分类号 |
G01R1/073;G01R3/00;G01R31/28;H01L21/66;(IPC1-7):G01R3/00;H01L21/68 |
主分类号 |
G01R1/073 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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