| 发明名称 |
Micromechanical cantilever suspension system |
| 摘要 |
Briefly, in a preferred embodiment, the present invention comprises a suspension having a structured surface hardening. This surface hardening may be comprised of thin film stripes of material such as nitrides, carbides, and adamantine carbon. The hardened layer has a thickness in the range of 10-100 nm.
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| 申请公布号 |
US6359755(B1) |
申请公布日期 |
2002.03.19 |
| 申请号 |
US19990354941 |
申请日期 |
1999.07.15 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
DIETZEL ANDREAS;FLEISCHMANN FRIEDRICH |
| 分类号 |
G11B21/21;G11B5/48;(IPC1-7):G11B5/48 |
主分类号 |
G11B21/21 |
| 代理机构 |
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