| 摘要 |
Disclosed is a thermal air flow sensor in which polycrystalline silicon is used as a heat generating resistor, and which has improved detection sensitivity. An upstream heat generating resistor, a downstream heat generating resistor, a temperature measuring resistor, and an air temperature measuring resistor are formed on a silicon substrate. These resistors are each formed of a semiconductor thin film in which polycrystalline silicon is mixed with a silicide compound and which contains an impurity doped therein. The formed resistor has small specific resistance and a large resistance temperature coefficient.
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